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Fabrication of SU-8 multilayer microstructures based on successive CMOS compatible adhesive bonding and releasing steps

MEMS/MST Department, IKERLAN S. Coop. P° J.M. Arizmendiarrieta N° 2, Mondragón, Spain
E-mail: magirregabiria@ikerlan.es
Fax: 34 943796944
Tel: 34 943712400
Department of Genetics, Physical Anthropology and Animal Physiology, Faculty of Sciences, University of the Basque Country, Bilbao, Spain
E-mail: ggpfuela@lg.ehu.es
Fax: 34 944649266
Tel: 34 946015696
Lab Chip, 2005,5, 545-552

DOI: 10.1039/B500519A
Received 17 Jan 2005, Accepted 08 Mar 2005
First published online 11 Apr 2005
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