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Issue 21, 2004
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The design and synthesis of heterometallic alkoxide-amides and their application in the MOCVD of zirconium-tin-titanate (ZTT)

Jack F. Eichler,a  Oliver Justa  and  William S. Rees, Jr.*a 
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* Corresponding authors

a School of Chemistry and Biochemistry, and School of Materials Science and Engineering and Molecular Design Institute, Georgia Institute of Technology, Atlanta, USA
E-mail: will.rees@chemistry.gatech.edu
Fax: 404-894-1144
Tel: 404-894-4049

Abstract

The novel heterometallic alkoxide-amide species, [Ti{OPri}3{N(SnMe3)2}] (1), [Ti{OBut}3{N(SnMe3)2}] (2), and [Ti{OPri}3{N(SnMe3)(SiMe3)}] (3) have been synthesized and fully characterized. Compounds 1–3 were used in combination with tetrakis(tert-butoxide)zirconium(IV) to obtain zirconium-tin-titanate (ZTT) films via metal organic chemical vapor deposition (MOCVD). A low-pressure vapor draw (pressure ∼ 5 Torr) was used to deliver the precursor to an oxygen-rich, hot-walled tube furnace (temperature = 430 °C) where metal oxide thin films were deposited on silicon wafers approximately 1.5 cm × 1.5 cm in size. The surface morphology of the as-deposited films has been characterized by SEM, and preliminary XPS measurements indicate that the metals of interest are transported to the substrate surface in the deposition process. The ZTT film grown from a separate vapor draw of 2 and Zr(OBut)4 was determined to have an approximate composition of Zr0.97Sn0.12Ti0.05O3.33.

Graphical abstract: The design and synthesis of heterometallic alkoxide-amides and their application in the MOCVD of zirconium-tin-titanate (ZTT)

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Publication details

The article was received on 05 May 2004, accepted on 01 Sep 2004 and first published on 28 Sep 2004


Article type: Paper
DOI: 10.1039/B406777K
Citation: J. Mater. Chem., 2004,14, 3139-3143
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    The design and synthesis of heterometallic alkoxide-amides and their application in the MOCVD of zirconium-tin-titanate (ZTT)

    J. F. Eichler, O. Just and W. S. Rees, Jr., J. Mater. Chem., 2004, 14, 3139
    DOI: 10.1039/B406777K

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