Precursor chemistries for the electronics, opto-electronics and optical industries

Abstract

Chemical gases and precursors have continued to be one of the main drivers enabling ongoing micro-miniaturisation in the electronics, electro-optics and optical industries. This paper will present a review of some of the background and ongoing challenges for gases and precursor chemistry as applied to solving real challenges of industrial importance, and as a backdrop to the contributed talks at this meeting on state of the art ongoing research.