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Issue 21, 2004
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Precursor chemistries for the electronics, opto-electronics and optical industries

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Abstract

Chemical gases and precursors have continued to be one of the main drivers enabling ongoing micro-miniaturisation in the electronics, electro-optics and optical industries. This paper will present a review of some of the background and ongoing challenges for gases and precursor chemistry as applied to solving real challenges of industrial importance, and as a backdrop to the contributed talks at this meeting on state of the art ongoing research.

Graphical abstract: Precursor chemistries for the electronics, opto-electronics and optical industries

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Publication details

The article was received on 16 Apr 2004, accepted on 17 Jun 2004 and first published on 23 Sep 2004


Article type: Feature Article
DOI: 10.1039/B405703A
Citation: J. Mater. Chem., 2004,14, 3071-3080
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    Precursor chemistries for the electronics, opto-electronics and optical industries

    J. Irven, J. Mater. Chem., 2004, 14, 3071
    DOI: 10.1039/B405703A

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