Issue 7, 2004

Patterning of DNA nanostructures on silicon surface by electron beam lithography of self-assembled monolayer

Abstract

Nanoscale patterns of modified oligonucleotides are produced on octadecyltrimethoxysilane self-assembled monolayers at a silicon surface by electron beam lithography. DNA structures with feature sizes of the order of 250 nm were detected by epi-fluorescence microscopy.

Graphical abstract: Patterning of DNA nanostructures on silicon surface by electron beam lithography of self-assembled monolayer

Article information

Article type
Communication
Submitted
25 Nov 2003
Accepted
16 Feb 2004
First published
05 Mar 2004

Chem. Commun., 2004, 786-787

Patterning of DNA nanostructures on silicon surface by electron beam lithography of self-assembled monolayer

G. Zhang, T. Tanii, T. Funatsu and I. Ohdomari, Chem. Commun., 2004, 786 DOI: 10.1039/B315278B

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