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CO2-laser micromachining and back-end processing for rapid production of PMMA-based microfluidic systems

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Mikroelektronik Centret, DTU Building 345 East, Ørsteds Plads, Kgs. Lyngby, Denmark
Lab Chip, 2002,2, 242-246

DOI: 10.1039/B206409J
Received 02 Jul 2002, Accepted 29 Aug 2002
First published online 17 Sep 2002
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