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Paper

Preparation of boron nitride thin films by microwave PECVD and their analytical characterisation

T. Thamm,*a   W. Baumann,a   D. Dietrich,a   N. Meyer,a   S. Stöckela and   G. Marxa  
*
Corresponding authors
a
Chemnitz University of Technology, Institute of Chemistry, Department of Physical Chemistry, D-09107 Chemnitz, Germany
E-mail: thomas.thamm@chemie.tu-chemnitz.de
Phys. Chem. Chem. Phys., 2001,3, 5150-5153

DOI: 10.1039/B106220B
Received 12 Jul 2001, Accepted 09 Oct 2001
First published online 23 Nov 2001
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