Synthesis and characterisation of two novel titanium isopropoxides stabilised with a chelating alkoxide: their use in the liquid injection MOCVD of titanium dioxide thin films

Abstract

The new precursors [Ti(OPri)3(OCH2CH2NMe2)] 1 and [Ti(OPri)2(OCH2CH2NMe2)2] 2 have been prepared and characterised. Compound 1 exists in solution at room temperature as a mixture of monomer and dimer(s), however at elevated temperatures the monomer predominates. Compound 2 exists in solution predominantly as a monomeric complex presumably with pseudo-octahedral coordination at the metal centre. Thin films of TiO2 have been deposited at 300-450C by liquid injection MOCVD using both 1 and 2. Analysis of the films by Auger electron spectroscopy failed to detect nitrogen although trace carbon was detected at levels of between 2.9 and 7.7. The potential utility of these modified compounds as precursors to TiO2 is discussed.