Soft lithography is a low-cost, non-photolithographic strategy for
carrying out micro- and nano-fabrication. This unconventional approach
consists of techniques based on self-assembly and replica molding of
organic molecules and polymeric materials. Four such techniques,
microcontact printing (µCP), replica molding, micromolding in
capillaries (MIMIC), and microtransfer molding (µTM), have been
demonstrated for the fabrication of patterns and structures of a variety
of materials with dimension ≥30 nm. This review describes these
techniques and their applications in fabrication and manufacturing at the
sub-100 nm scale.
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Journal of Materials Chemistry
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