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Issue 7, 2014
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Chemical solution growth of ferroelectric oxide thin films and nanostructures

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Abstract

Chemical solution deposition (CSD) provides a low-cost, versatile approach for processing of thin and ultrathin ferroelectric films, as well as short and high aspect ratio ferroelectric nanostructures. This review discusses the state of the art in the processing of ferroelectric oxide thin films and nanostructures by CSD, with special emphasis on nucleation and growth phenomena. The effects of choice of precursor solution, substrate and bottom electrode stack, and thermal treatment conditions on the nucleation and growth are examined. Furthermore, methods to control ferroelectric thin film's microstructure, including phase content, texture, grain size and chemical homogeneity, are reviewed. Lastly, current CSD-based methods for processing of ferroelectric oxide nanostructures are presented with special consideration of the structural development, as well as advantages and shortcomings associated with each method. Lead zirconate-titanate, Pb(ZrxTi1−x)O3 (PZT), and barium titanate, BaTiO3 (BT), are used throughout the discussion, as specific examples for CSD processing of perovskite ferroelectrics.

Graphical abstract: Chemical solution growth of ferroelectric oxide thin films and nanostructures

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Publication details

The article was received on 11 Jul 2013 and first published on 14 Oct 2013


Article type: Tutorial Review
DOI: 10.1039/C3CS60250H
Citation: Chem. Soc. Rev., 2014,43, 2125-2140
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    Chemical solution growth of ferroelectric oxide thin films and nanostructures

    N. Bassiri-Gharb, Y. Bastani and A. Bernal, Chem. Soc. Rev., 2014, 43, 2125
    DOI: 10.1039/C3CS60250H

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